Willson, Grant Ph.D.

Rashid Engineering Regents Chair

Willson, Grant
Office: WEL 5.240 Mailing Address:
Phone: (512) 471-4342 The University of Texas at Austin
Fax: Department of Chemical Engineering
Email: willson@che.utexas.edu 200 E Dean Keeton St. Stop C0400
UT Mail: C0400 Austin, TX 78712-1589

Research Areas: Advanced Materials, Polymers & Nanotechnology,                                                       Modeling & Simulation and Process Engineering

Research Group Website

Presentation for Prospective Graduate Students

Educational Qualifications

Ph.D., University of California, Berkeley (1973)
M.S., San Diego State University (1969)
B.S., University of California, Berkeley (1962)


Polymers, materials, and processes for microelectronics, photoresists, liquid crystals, computer simulation, mass transport studies, kinetics, graft polymerization, biosensor arrays, novel processes for producing nanometer scale structures


Our research projects are chosen to provide students with an interesting, challenging, and important interdisciplinary problem that will produce new and useful knowledge. The projects are also designed to provide a framework in which graduate students learn to design and carry out experiments and to report the results of their work in written and oral form. We strive to provide students with the opportunity to participate in collaborations with other students and other institutions and to thereby gain research team work experience.

You are encouraged to visit our group web page. This page is the best source of detailed information about the research group and current projects.

Awards & Honors

Japan Prize (2013)
Inventor of the Year, The University of Texas at Austin (2012)
Fellow, Materials Research Society (2012)
Inaugural Fellow of the American Chemical Society (2009)
Gordon E. Moore Medal (2009)
National Medal of Technology and Innovation (2007)
SEMI North America Award (2007)
National Medal of Technology and Innovation (2007)
Elected SPIE Fellow (2007)
SEMI North America Award (2007)
TeaChE 2006 Teaching Excellence Award in Chemical Engineering (2006)
AIChE Arthur DeHon Award (2005)
AIChE Arthur DeHon Award (2005)
ACS Award in Applied Polymer Science (2005)
Fritz Zernike Award, SPIE 2005 (2005)
ACS Heroes in Chemistry Award (2005)
Fellow of the PMSE Division of ACS (2000)
National Academy of Sciences Award for Chemistry in Service to Society (1999)
Malcolm E. Pruitt Award (1999)
SRC Aristotle Award (1998)
SRC Technical Excellence Award (1996)
Alumnus of the Year, San Diego State University (1993)
ACS Cooperative Research Award in Polymer Science (1993)
ACS Carothers Awards (1992)
Elected to National Academy of Engineering (1992)
ACS Award in the Chemistry of Materials (1991)
Alexander von Humboldt Senior Scientist Award, FRG (1988)
A.D. Doolittle Award, PMSE Division of ACS (1986)
IBM Fellow (1985)

Selected Publications

  • Bates, Christopher M. ; Maher, Michael J.; Janes, Dustin W.; Ellison, Christopher J.; Willson, C. Grant “Block copolymer lithography,” Macromolecules 47(1) 2-12 (2014).
  • Deschner, Ryan ; Tang, Hao; Allen, Peter; Hall, Cecilia; Hlis, Rocco; Ellington, Andrew; Willson, C. Grant “Progress Report on the Generation of Polyfunctional Microscale Particles for Programmed Self-Assembly,” Chemistry of Materials 26(3) 1457-1462 (2014).
  • Maher, Michael J. ; Bates, Christopher M.; Blachut, Gregory; Sirard, Stephen; Self, Jeffrey L.; Carlson, Matthew C.; Dean, Leon M.; Cushen, Julia D.; et al. “Interfacial Design for Block Copolymer Thin Films,” Chemistry of Materials 26(3) 1471-1479 (2014).
  • Takei, Satoshi ; Ogawa, Tsuyoshi; Deschner, Ryan; Willson, Carlton Grant “Reduction of pattern peeling in step-and-flash imprint lithography,” Microelectronic Engineering 116 44-50 (2014).
  • Zhai, Yujia ; Mathew, Leo; Raob, Rajesh; Sreenivasan, S. V.; Willson, C. Grant; Banerjee, Sanjay K. “Vertical finFET with Salicide Contact for Potential Power Applications,” ECS Journal of Solid State Science and Technology 3(10) (2014).
  • Bates, Christopher M; Pantoja, Marco A. Bedolla; Strahan, Jeffrey R.; Dean, Leon M.; Mueller, Brennen K.; Ellison, Christopher J.; Nealey, Paul F.; Willson, C. Grant “Synthesis and thin-film orientation of poly(styrene-block-trimethylsilylisoprene),” Journal of Polymer Science, Part A: Polymer Chemistry 51(2) 290-297 (2013).
  • Janes, Dustin W.; Thode, Christopher J.; Willson, C. Grant; Nealey, Paul F.; Ellison, Christopher J. “Light-Activated Replication of Block Copolymer Fingerprint Patterns,” Macromolecules 46(11) 4510-4519 (2013).
  • Kim, Sangwon ; Christopher M.; Thio, Anthony; Cushen, Julia D.; Ellison, Christopher J.; Willson, C. Grant; Bates, Frank S. “Consequences of Surface Neutralization in Diblock Copolymer Thin Films,” ACS Nano 7(11) 9905-9919 (2013).
  • Ogawa, Tsuyoshi ; Daniel J. Hellebusch; Michael W. Lin; B. Michael Jacobsson; William Bell; C. Grant Willson J. “Reactive fluorinated surfactant for step and flash imprint lithography ,” Micro/Nanolith. MEMS MOEMS 12(3) 031114 (2013).
  • Ogawa, Tsuyoshi ; Satoshi Takei, C. Grant Willson “Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography,” J. Vac. Sci. Technol. B 31(1) 011601-1 (2013).
  • Bates, Christopher M.; Seshimo, Takehiro; Maher, Michael J.; Durand, William J.; Cushen, Julia D.; Dean, Leon M.; Blachut, Gregory; Ellison, Christopher J.; Willson, C. Grant “Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains,” Science 338(6108) 775 (2012).
  • Cushen, Julia D.; Bates, Christopher M.; Rausch, Erica L.; Dean, Leon M.; Zhou, Sunshine X.; Willson, C. Grant; Ellison, Christopher J. “Thin Film Self-Assembly of Poly(trimethylsilylstyrene-b-D,L-lactide) with Sub-10 nm Domains,” Macromolecules 45(21) 8722-8728 (2012).
  • Cushen, Julia D.; Otsuka, Issei; Bates, Christopher M.; Halila, Sami; Fort, Sebastien; Rochas, Cyrille; Easley, Jeffrey A.; Rausch, Erica L.; Thio, Anthony; et al “Oligosaccharide/Silicon-Containing Block Copolymers with 5 nm Features for Lithographic Applications,” ACS Nano 6(4) 3424-3433 (2012).
  • Hagiwara, Yuji ; Mesch Ryan A; Kawakami Takanori; Okazaki Masahiro; Jockusch Steffen; Li Yongjun; Turro Nicholas J; Willson Carlton Grant “The Design and Synthesis of a Photo-Aromatization Based Two-Stage Photobase Generator for Pitch Division Lithography,” The Journal of Organic Chemistry (2012).
  • Tang, Hao ; Deschner, Ryan; Allen, Peter; Cho, Younjin; Sermas, Patrick; Maurer, Alejandro; Ellington, Andrew D.; Willson, C. Grant “Analysis of DNA-Guided Self-Assembly of Microspheres Using Imaging Flow Cytometry,” Journal of the American Chemical Society 134(37) 15245 (2012).
  • Turro, Nicholas J.; Li Yongjun; Jockusch Steffen; Hagiwara Yuji; Okazaki Masahiro; Mesch Ryan A; Schuster David I; Willson Carlton Grant “Study of a Two-stage Photobase Generator (PBG) for Photolithography in Microelectronics,” The Journal of Organic Chemistry (2012).