MURI on Silicon and Germanium Thin Film Chemical Vapor Deposition, Modeling and Control

funded by AFOSR and DARPA


Principal Investigator University of Texas Co-Investigators University of Wisconsin Co-Investigators
John G. Ekerdt

Phone: (512) 471-4689

E-mail: ekerdt@che.utexas.edu

Sanjay K. Banerjee: banerjee@ece.utexas.edu

Michael C. Downer: downer@utaphy.ph.utexas.edu

Isaac Trachtenberg: trachtenberg@che.utexas.edu

Thomas F. Kuech: kuech@engr.wisc.edu

James B. Rawlings: jbraw@bevo.che.wisc.edu

Vision

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