PUBLICATIONS 1992 - PRESENT

[92]      J. L. Bravo, A.A. Patwardhan, and T.F. Edgar. Influence of Effective Interfacial Areas in the Operation and Control of Packed Distillation Columns. IEC Research, Vol. 31, pp. 604-607, 1992.

[93]      K.J. McLaughlin, S.W. Butler, I. Trachtenberg, and T.F. Edgar. Development of Techniques for Real-Time Monitoring and Control in Plasma Etching I. Response Surface Modeling of CF4/O2 and CF4/H2 Etching of Silicon and Silicon Dioxide. J. Electrochem. Soc., Vol. 138, pp. 789-799, 1991.

[94]      S.W. Butler, K.J. McLaughlin, I. Trachtenberg, and T.F. Edgar. Development of Techniques for Real-Time Monitoring and Control in Plasma Etching II. Multivariable Control System Analysis of Manipulated, Measured and Performance Variables. J. Electrochem. Soc., Vol. 138, pp. 2727-2735, 1991.

[95]      J. Lee, W. Cho and T.F. Edgar. An Improved Technique for PID Controller Tuning from Closed-Loop Tests. AIChE Journal, Vol. 36(2), pp. 1891-1895, 1990.

[96]      K.J. McLaughlin, I. Trachtenberg, and T.F. Edgar. Real-time Monitoring and Control for Plasma Etching. IEEE Cont. Sys. Soc. Magazine, Vol. 11(3), pp. 3-10, 1991.

[97]      A.A. Patwardhan, G.T. Wright, and T.F. Edgar. Nonlinear Model Predictive Control of Distributed Parameter Systems. Chem. Engr. Sci., Vol. 47, pp. 721-735, 1992.

[98]      T.A. Badgwell, I. Trachtenberg, J.K. Elliott, and T.F. Edgar. Experimental Verification of a Fundamental Model for Multiwafer LPCVD of Polysilicon. J. Electrochem. Soc., Vol. 139, pp. 524-532, 1992.

[99]      T.A. Badgwell, I. Trachtenberg, J.K. Elliott, and T.F. Edgar. In-Situ Measurement of Wafer Temperatures in a Multiwafer LPCVD Furnace. IEEE Trans. Semicond. Manuf., Vol. 6(1), pp. 65-71, 1993.

[100]    M.J. Liebman, L. Lasdon, and T.F. Edgar. Efficient Data Reconciliation and Estimation for Dynamic Processes Using Nonlinear Programming Techniques. Comp. Chem. Engr., Vol. 16, pp. 963-986, 1992.

[101]    T.A. Badgwell, I. Trachtenberg and T.F. Edgar. Modeling and Scaleup of Multiwafer LPCVD Reactors. AIChE Journal, Vol. 38, pp. 926-937, 1992.

[102]    T.F. Edgar. (Featured Educator), Chem. Engr. Educ., Vol. 26, pp. 2-7, Winter, 1992.

[103]    S. Chatterjee, I. Trachtenberg, and T.F. Edgar. Mathematical Modeling of a Single Wafer Rapid Thermal Reactor. J. Electrochem. Soc., Vol. 139, pp. 3682-3689, 1992.

[104]    C. Ling and T.F. Edgar.  The Tuning of Fuzzy Heuristic Controllers.  Asia-Pacific Engr. J. (A), Vol. 3, pp. 83-104, 1993.

[105]    C. Ling and T.F. Edgar. A New Fuzzy Gain Scheduling Algorithm for Process Control. Asia-Pacific Engr. J. (A), Vol. 3, pp. 129-141, 1993.

[106]    A.J. Toprac, I. Trachtenberg, and T.F. Edgar. Modeling of Gas Phase Chemistry in the Chemical Vapor Deposition of Polysilicon in a Cold Wall System. J. Electrochem. Soc., Vol. 140, pp. 1809-1813, 1993.

[107]    A. Patwardhan and T.F. Edgar. Nonlinear Model Predictive Control of a Packed Distillation Column. IEC Research, Vol. 32, pp. 2345-2356, 1993.

[108]    T.A. Badgwell, I. Trachtenberg, and T.F. Edgar.  Modeling the Wafer Temperature Profile in a Multiwafer LPCVD Furnace. J. Electrochem. Soc., Vol. 141(1), pp. 161-172, 1994.

[109]    G.T. Wright and T.F. Edgar. Nonlinear Model Predictive Control of a Fixed Bed Water Gas Shift Reactor: An Experimental Study. Comp. Chem. Engr., Vol. 18(2), pp. 83-102, 1994.

[110]    A.J. Toprac, I. Trachtenberg, and T.F. Edgar. A Predictive Model for the Chemical Vapor Deposition of Polysilicon in a Cold Wall, Rapid Thermal System. J. Electrochem. Soc., Vol. 141(6), pp. 1658-1663, 1994.

[111]    Y.L. Huang and T.F. Edgar. An Artificial Intelligence Approach to the Synthesis of a Process for Waste Minimization. Emerging Technologies in Hazardous Waste Management, Amer. Chem. Soc., Chapter 6, pp. 96-113, 1994.

[112]    Y.L. Huang, T.F. Edgar, D.M. Himmelblau, and I. Trachtenberg. Constructing a Reliable Neural Network Model for a Plasma Etching Process Using Limited Experimental Data.  IEEE Trans. Semicond. Manuf., Vol. 7(3), pp. 333-343, 1994.

[113]    J.R. Bosley and T.F. Edgar. An Efficient Dynamic Model for Batch Distillation. J. Proc. Cont., Vol. 4(4), pp. 195-204, 1994.

[114]    T.F. Edgar et al. T.A. Badgwell.  Modeling and Control of Microelectronics Processing.  Comp. Chem. Engr., Vol. 19, No. 1, pp. 1-41, 1995.

[115]    R. Dunia, S.J. Qin, T.F. Edgar and T.J. McAvoy.  Identification of Faulty Sensors Using Principal Component Analysis.  AIChE Journal.  Vol. 42, No. 10, pp. 2797-2812, 1996.

[116]    K. McBrayer and T.F. Edgar.  Bias Detection and Estimation in Dynamic Data  Reconciliation.  J. Proc. Cont. Vol. 5(4), pp. 285-293, 1996

[117]    T.F. Edgar.  Control of Unconventional Processes.  J. Proc. Cont. Vol. 6, pp. 99-110, 1996.

 

[118]    I. Kim, S.W. Park, and T.F. Edgar.  Data Reconciliation for Input-Output Models in Linear Dynamic Systems.  Korean Journal of Chemical Engineering, Vol. 13(2) pp. 211-215, 1996.

[119]    R. Dunia, S.J. Qin, T.F. Edgar, and T.F. McAvoy.  Use of Principal Component Analysis for Sensor Fault Identification.  Computers Chem Engng. Vol. 20, Suppl. pp. S713-S718, 1996.

[120]    R. Dunia and T.F. Edgar.  An Improved Generic Model Control Algorithm for Linear Systems.  Computers Chem. Engng. Vol. 20, No. 8, pp. 1003-1016, 1996.

[121]    S.W. Butler and T.F. Edgar.  Case Studies in Equipment Modeling and Control in the Microelectronics Industry. Chemical Process Control - CPC-V, Lake Tahoe, CA.  AIChE Symp. Ser. Vol. 93, No. 316 p. 133-144, 1997.

[122]    T.F. Edgar.  Process Control:  From Classical to the Postmodern Era.  Chem. Engr. Educ., Vol. 31(2), pp. 12-18, 1997.

[123]    R. Dunia, B. Fernandez, and T.F. Edgar.  Effect of Process Uncertainties on Generic Model Control:  A Geometric Approach.  Chem. Engr. Sci., Vol. 52, pp. 2205-2222, 1997.

[124]    I. Kim, M.S. Kang, S.W. Park, and T.F. Edgar.  Robust Data Reconciliation and Gross Error Detection:  The Modified MIMT using NLP.  Comp. Chem. Engr., Vol. 21, No. 7, pp. 775-782, 1997.

[125]    J.T. Lee, W. Cho, and T.F. Edgar.  Control System Design Based on a First Order Plus Time Delay Model.  J. Proc. Cont., Vol. 7, No. 1, pp. 65-73, 1997.

[126]    S. Bushman, I. Trachtenberg, and T.F. Edgar.  Radio Frequency Diagnostics for Plasma Etch Systems.  Journal of the Electrochemical Society, Vol. 144, No. 2, pp. 721-732, 1997.

[127]    S. Bushman, I. Trachtenberg, and T.F. Edgar.  Modeling of Plasma Etch Systems Using Ordinary Least Squares, Recurrent Neural Network, and Projection to Latent Structure Models. Journal of the Electrochemical Society, Vol. 144, No. 4, pp. 1379-1389, April 1997.

[128]    Zhong-Xiang Zhu, J.T. Lee, and T.F. Edgar.  Steady State Structural Analysis and Interaction Characteristics in Multivariable Control Systems.  IEC Research, Vol. 36, pp. 3718-3726, 1997.

[129]    C. Ling, and T.F. Edgar.  Real-time Control of a Water-Gas Shift Reactor by Model-Based Fuzzy Gain Scheduling Technique.  J. Proc. Cont.. Vol. 7, No. 4, pp. 239-253, 1997.

[130]    J.T. Lee, W. Cho, and T.F. Edgar.  Effects of Diagonal Input Uncertainties and Element Uncertainties in Ill-conditioned processes.  IEC Research, Vol. 37, pp. 1009-1017, 1998.

[131]    J.T. Lee, W. Cho, and T.F. Edgar.  Iterative Identification Methods for Ill-conditioned Processes.  IEC Research, Vol. 37, pp. 1018-1023, 1998.

[132]    K. Edwards, V.I. Manousiouthakis, and T.F. Edgar.  Kinetic Model Reduction Using Genetic Algorithms.  Comp. Chem. Engr., Vol. 22, No. 1-2, pp. 239-246, 1998.

[133]    J.T. Lee and T.F Edgar.  Multiloop PI Controller Tuning for Interacting Multivariable Processes.  Comp. Chem. Engr. Vol. 22.  No. 11, pp. 1711-1723, 1998.

[134]    J.D. Stuber, I. Trachtenberg, and T.F. Edgar.  Design and Modeling of Rapid Thermal Processing Systems.  IEEE Trans. Semiconductor Manufacturing.  Vol. 11, No. 3, pp. 442-457, August, 1998.

[135]    K.F. McBrayer, T. Soderstrom, T.F. Edgar, and R. Young. The Application of Nonlinear Dynamic Data Reconciliation to Plant Data.  Comp. Chem. Engr. Vol 22. No. 12, pp. 1907-1911, 1998.

[136]    K. Teague, and T.F. Edgar.  Predictive Dynamic Model of a Small PSA Separation Unit. IEC Research, Vol. 28, No. 10, pp. 3761-3775, 1999.

[137]    Y. Huang, J.P. Gong, and T.F. Edgar.  Fuzzy Model Predictive Control. IEEE Trans. Fuzzy Systems, Vol. 8(6), pp. 665-678, 2000.

[138]    T.F. Edgar, S. Butler, W.J. Campbell, C. Pfeiffer, C. Bode, S.B. Hwang, K.S. Balakrishnan and J. Hahn.  Automatic Control in Microelectronics Manufacturing:  Practices, Challenges, and Possibilities.  Automatica,  Vol.36(11): pp. 1567-1603, 2000.

[139]    K.S. Balakrishnan and T.F. Edgar.  Model-based Control in Rapid Thermal Processing. J. Thin Solid Films, Vol. 365(2), pp. 322-333, 2000.

[140]    T.F. Edgar.  Information Technology and Chemical Engineering Education.  Evolution or Revolution? Chem Engr. Educ, pp. 290-295, March, 2000.

[141]    T.F. Edgar.  Process Information.  Achieving a Unified View.  Chem. Engr. Prog., Vol. 96, pp. 51-57, January, 2000.

[142]    B.S. Ko, and T.F. Edgar.  Performance Assessment of Cascade Loop Using Minimum Variance Principles. AIChE Journal, Vol. 46, pp. 281-291, 2000.

[143]    J.T. Lee, J.Y. Choi and T.F. Edgar.  Use of Sequential Loop Closing Method for Iterative Identification of Ill-Conditioned Processes. IEC Research, Vol. 39, pp. 2404-2409 (2000).

[144]    K. Edwards and T.F. Edgar.  Reaction Mechanism Simplification Using Variable Selection Techniques. Chem. Engr. Sci., 55, pp. 551-572, 2000.

[145]    J.T. Lee and T.F. Edgar.  Phase Conditions for Stability of Multiloop Control Systems. Comp. Chem. Engr. Vol. 23, pp. 1623-1630, 2000.

[146]    T. Soderstrom, R. Young, L. Russo and T.F. Edgar.  Industrial Application of a Large-Scale Dynamic Data Reconciliation Strategy. IEC Res, Vol. 39(6), pp. 1683-1693, 2000.

[147]    J.T. Lee, and T.F. Edgar.  Computational Methods for Decentralized Integral Controllability of Low Dimensional Processes.  Comp.  Chem. Engr. Vol. 24, pp. 847-852, 2000.

[148]    J.T. Lee, D.G. Koo, and T.F. Edgar.  Robust Controller Design Method for Systems with Parametric Uncertainties.  Trans. Cont., Auto. & Systems . Engr., Vol. 2, No. 2, pp. 140-148, June, 2000.

[149]    K. Edwards and T.F. Edgar.  Reaction Mechanism Simplification Using Mixed-Integer Nonlinear Programming.  Comp. Chem. Engr. 24, pp. 67-79, 2000.

[150]    J. Hahn and T.F. Edgar.  A Gramian Based Approach to Nonlinearity Quantification and Model Classification.   IEC Research, Vol. 40, pp. 5724-5731, 2001.

[151]    J. Hahn, T. Edison and T.F. Edgar.  A Note on Stability Analysis Using Bode Plots. Chemical Engineering Education, Vol. 35, No. 3, pp. 208-211, 2001.

[152]    J.T. Lee and T.F. Edgar.  Real Structured Singular Value Conditions for D-Stability.  Systems and Control Letters, Vol. 44, pp. 273-277, 2001.

[153]    J.T. Lee, B.S. Ko and T.F. Edgar.  “Adaptive Slow/Fast Control Systems for Interacting Multivariable Processes,” IEC Research, Vol. 40, pp. 5929-5934, 2001.

[154]    T.A. Soderstrom and T.F. Edgar.  A Mixed Integer Optimization Approach for Simultaneous Data Reconciliation and Identification of Measurement Bias.  Control Engineering Practice, Vol. 9, pp. 869-876, 2001.

[155]    B.S. Ko and T.F. Edgar.  Performance Assessment of Constrained Model Predictive Control Systems, AIChE J. Vol. 47(6), pp. 1363-1372, 2001.

[156]    J. Hahn and T.F. Edgar.  An Improved Method for Nonlinear Model Reduction using Balancing of Empirical Gramians.   Computers & Chem. Engr., Vol. 26, pp. 1379-1397, 2002.

[157]    S. Alici and T.F. Edgar.   Nonlinear Dynamic Data Reconciliation Via Process Simulation Software and Model Identification Tools, IEC Research, Vol. 41, pp. 3984-3992, 2002.

[158]    J. Lee and T.F. Edgar.  “An Improved PI Controller with Delayed or Filtered Integral Mode”, AIChE Journal, Vol. 48, pp. 2844-2850, 2002.

[159]    J. Peng, S. Lextrait, T.F. Edgar and R.B. Eldridge. A Comparison of Steady State Equilibrium and Rate-based Models for Packed Reactive Distillation Columns, IEC Research, Vol. 4, pp. 2735-2744, 2002.

[160]    J.T. Lee and T.F. Edgar.  Subspace Identification Method for Simulation of Closed-loop Systems with Time-Delays.  AIChE Journal, Vol. 48, pp. 417-420, 2002.

[161]    J. Hahn and T.F. Edgar.  A Balancing Approach to Minimal Realization of Nonlinear Systems.  IEC Research, Vol. 41, pp. 2204-2212, 2002.

[162]    J. Hahn, T. Edison and T.F. Edgar.  Adaptive IMC Control for Drug Infusion for Biological Systems.  Control Engineering Practice, Vol. 10, pp. 45-56, 2002.

[163]    S.B. Hwang, W.D. Kim and T.F. Edgar.  Modeling of Dry Development in Bilayer-Resist Process for 140nm Contact Hole Patterning, IEEE Transaction on Semiconductor Manufacturing, Vol. 15, pp. 245-252, 2002.

[164]    J. Hahn, S. Lextrait and T.F. Edgar.  Nonlinear Balanced Model Residualization via Neural Networks.  AIChE Journal, Vol. 48, pp. 1353-1357, 2002.

[165]    J.T. Lee and T.F. Edgar.  Conditions for Decentralized Integral Controllability, J.  Process Control, Vol. 12, pp. 797-805, 2002.

[166]    J. Hahn, T.F. Edgar and W. Marquardt.  Observability and Controllability Covariance Matrices for the Analysis and Order Reduction of Stable Nonlinear Systems. J. Process Control, Vol. 13, pp. 115-127, 2002.

[167]    J.J. Peng, T.F. Edgar and R.B. Eldridge.  Dynamic Rate-Based and Equilibrium Models for a Packed Reactive Distillation Column.  Chemical Engineering Science, Vol. 58, pp. 2671-2680, 2003.

[168]    T.F. Edgar.  ChE Curriculum of the Future:  Re-Evaluating the Process Control Course.  Chem. Engr. Educ., Vol. 37(2), pp. 1, 2003.

[169]    D.W. Kim, S.B. Hwang, T.F. Edgar and S. Banerjee. “Characterization of Si-Ge Quantum Dot on SiO2 and HfO2 Grown By Rapid Thermal Chemical Deposition for Nanoelectric Devices”, Electrochemical Society, Vol.150 (4), pp. G240-G243, 2003.

[170]    J.T. Lee and T.F. Edgar.  Dynamic Interaction Measures for Decentralized Control of Multivariable Processes, IEC Research, Vol. 43, pp. 283-287, 2004.

[171]    C.A. Bode, B.S. Ko and T.F. Edgar. “Run-to-Run Control and Performance Monitoring of Overlay in Semiconductor Manufacturing”, Control Engineering Practice, Vol. 12, pp. 893-900, 2004.

[172]    Y. Chen, T.F. Edgar and V. Manousiouthakis. “On Constrained Infinite-Time Nonlinear Quadratic Optimal Control”, Systems and Control Letters, Vol. 51(3-4): 259-268, 2004.

[173]    B.S. Ko, J.T. Lee and T.F. Edgar. “An Analytic Expression for Closed-Loop Output Behavior Under Multiloop PID Control, Korean, J. Chem. Engr., Vol. 21 No. 1, pp. 1-5, 2004.

[174]    B.S. Ko and T.F. Edgar. “PID Control Performance Assessment:  The Single-Loop Case”, AIChE J., Vol. 50, pp. 1211-1218, 2004.

[175]    J.T. Lee and T.F. Edgar. “Simulations of Stable Non-conventional and Large Linear Processes Using the FFT Method”, Computers Chem. Engr., Vol. 28, pp. 479-485, 2004.

[176]    J.T. Lee and T.F. Edgar. “ISE Tuning Rule Revisited”, Automatica, Vol. 40, pp. 1455-1458, 2004.

[177]    S. Lextrait, R.B. Eldridge and T.F. Edgar. “Steady-State Rate-based Simulation for Packed Reactive Distillation:  Spatial Discretization”, IEC Research, Vol. 43, pp. 3855-3869, 2004.

[178]    T.F. Edgar. “Process Operations:  When Does Controllability Equal Profitability? Computer Chem. Engr., Vol. 29, pp. 41-49, 2004.

[179]    S.A. Harrison, D. Yu, G.S. Hwang, T.A. Kirichenko, S.K. Banerjee and T.F. Edgar. “Origin of Vacancy and Interstistical Stablization at the Amorphous Crystalline Interface”, J. Appl. Phys., Vol. 96, No. 6, pp. 3334-3338, 2004.

[180]    S.A. Harrison, G. Hwang and T.F. Edgar. “Interactions between Interstitials and Arsenic Vacancy Complexes in Crystalline Silicon”, Applied Physics Letters, Vol. 85(21), pp. 4935-4937, 2004.

[181]    T.F. Edgar, “Computing Practices of New Engineers”, Control Engineering, p. 81, June, 2004.

[182]    T.F. Edgar, “Controllability and Profitability”, Control Engineering, p. 59, November, 2004.

 

[183]    A.J. Pasadyn, A.J. and T.F. Edgar. “Observability and State Estimation for Multiple Product Control in Semiconductor Manufacturing”, IEEE Transactions on Semiconductor Manufacturing, Vol. 18(4), pp. 592-604, 2005.

[184]    J.D. Hedengren and T.F. Edgar. “In Situ Adaptive Tabulation for Real-time Control”, IEC Research, Vol. 44, pp. 2716-2724, 2005.

[185]    J.T. Lee and T.F. Edgar. “Static Decouplers for Control of Multivariable Processes”, AIChE J., Vol. 51(10), pp. 2712-2720, 2005.

[186]    J.D. Hedengren and T.F. Edgar.  “Order Reduction of Large Scale DAE Models”, Computers Chem. Engr., Vol. 29, pp. 2069-2077, 2005.

[187]    S.A. Harrison, T.F. Edgar and G.S. Hwang. “Structure, Stability, and Diffusion of Arsenic-Silicon Interstitial Pairs”, Applied Physics Letters, Vol. 87(23), pp. 231905-1-3, 2005.

[188]    J.T. Lee and T.F. Edgar. “Continuation Method for the Modified Ziegler-Nichols Tuning of Multiloop Control Systems”, IEC Research, Vol. 44, pp. 7428-7434, 2005.

[189]    S.A. Harrison, T.F. Edgar and G.S. Hwang. “Structure and Diffusion of the Diarsenic Complex in Crystalline Silicon” Phys. Rev. B, Vol. 72(19), pp. 195414-1-5, 2005.

[190]    T.F. Edgar, “Take a Systems Approach”, Control Engineering , p. 16, May, 2005.

[191]    T.F. Edgar, “Lab Courses Go Virtual”, Control Engineering, p.22, December, 2005.

[192]    W. Cho, J.T. Lee and T.F. Edgar. “Iterative Learning Dual-Model Control of Exothermic Batch Reactors”, submitted to Control Engineering Practice, June, 2005.

[193]    D. Castiñeira and T.F. Edgar. “CFD for Simulation of Crosswind on the Efficiency of High Momentum Jet Turbulent Combustion Flames”, submitted to Journal of Environmental Engineering, November, 2005.

[194]    D. Castiñeira and T.F. Edgar. "CFD for Simulation of Wind-tunnel experiments on Flare Combustion Systems," submitted to International Journal of Computational Fluid Dynamics, November, 2005.

[195]    S. Firth, A. Toprac, J. Campbell and T.F. Edgar. “Just-in-Time Adaptive Disturbance Estimation, IEEE Trans. Semi. Mfg., Vol. 19(3), pp. 298-315, 2006.

[196]    J. Lee and T.F. Edgar. “Multiloop PI/PID Control System Improvement via Adjusting the Dominant Pole or the Peak Amplitude Ratio”, Chem. Engr. Science, Vol. 61, No. 5, pp.1658-1666, 2006.

[197]    T.F. Edgar.  “Enhancing the Undergraduate Computing Experience in Chemical Engineering”, Chem. Engr. Educ., Vol. 38, p.231-238, 2006.

[198]    W. Cho, J. Lee and T.F. Edgar. “Closed-loop Identification of Wafer Temperature Dynamics in a Rapid Thermal Process”, Korean J. Chem Engr., Vol. 23, pp.171-175, 2006.

[199]    T.F. Edgar, “Process Control:  What to Teach?”, Control Engineering, p.26, May, 2006.

[200]    L. Rueda.  “A Novel Control Methodology for a Pilot Plant Azeotropic Distillation Column”, Ind. Eng. Chem. Res., Vol. 45, pp. 8361-8372, 2006.

[201]    T.F. Edgar, B.A. Ogunnaike and K.R. Muske.  “A Global View of Graduate Process Control Education”, Comp & Chem. Engr. Vol. 30, No. 10-12, pp. 1763-1774, 2006.

[202]    T.F. Edgar, B.A. Ogunnaike, K.R. Muske, J.J. Downs and B.W. Bequette. “Renovating the Undergraduate Process Control Course”, Comp & Chem. Engr. Vol. 30, No. 10-12, pp. 1749-1762, 2006.

[203]    D. Castiñeira and T.F. Edgar. "CFD for Simulation of Steam Addition and Air Addition on Flare Combustion Systems," in press, Energy and Fuels, 2006.

[204]    S.A. Harrison, T.F. Edgar and G.S. Hwang.  “Interstitial Mediated Arsenic Clustering in Ultrashallow Junction Formation”, Electrochem. Solid-State Lett., 9(12), G354-G357, 2006.

[205]    S.A. Harrison, T.F. Edgar and G.S. Hwang.  “Prediction of Anomalous Fluorine-Silicon Interstitial Pair Diffusion in Crystalline Si”, Phys. Rev. B-rapid communication 74(12), 121201, 2006.

[206]    S.A. Harrison, T.F. Edgar and G.S. Hwang.  “Interstitial-Mediated Mechanisms of Arsenic and Phosphorus Diffusion in Silicon,” Phys. Rev. B74(19), 195202, 2006.

[207]    D. Castiñeira, Morales, D. M. and T.F. Edgar. “Multivariate Image Analysis for Flare Control”, submitted to Industrial & Engineering Chemistry Research, July, 2006.

 [208]   Y. Chen, V. Manousiouthakis and T.F. Edgar.  “Globally Optimal Nonlinear Feedback:  Application to Nonisothermal CSTR Control”, Chemical Engineering Communications, Vol. 193(2), pp. 233-245, 2006.

[209]    V. Martinez and T.F. Edgar. “Control of Lithography in Semiconductor Manufacturing”, IEEE Control Systems Magazine, Vol. 26(6) pp. 46-55, 2006.

[210]    T.F. Edgar. “Fundamental Models and Process Control”, Control Engineering, p.36, November, 2006.

[211]    M.K. Markey, A.Holmes Jr., T.F. Edgar, and K.J. Schmidt. “Student-driven Learning in Integrated Lecture-lab Classroom Environments:  The Role of Mobile Computing, Intl. Journal of Engr. Educ., pp. 1-8, 2007.

[212]    S.A. Harrison, T.F. Edgar and G.S. Hwang, “Prediction of B-Sii-F Complex Formation and Its Role in B Transient Enhanced Diffusion Suppression and Deactivation”, ” J. Appl. Phys., Vol. 101(6), 066102, 2007.

[213]    J. Wang, P. He and T.F. Edgar, “On State Estimation in High-Mix Semiconductor Manufacturing Using a Singular Gauss-Markov Model”, submitted to IEEE Trans Semiconductor Mfg., 2007.

[214]    A.J. Pasadyn, H.J. Lee, and T.F. Edgar. “Scheduling Semiconductor Manufacturing Processes for Simultaneous Control and Identification”, submitted, J. Process Control, 2007.

[215]    D. Hedengren and T.F. Edgar.  “Approximate Nonlinear Model Predictive Control with In Situ Adaptive Tabulation”, in press Computers and Chemical Engineering, 2007.

[216]    J. Lee, S.W. Sung, and T.F. Edgar.  “Integrals of Relay Feedback Responses for Extracting Process Information”, accepted by AIChE J. May, 2007.

[213]      T.F. Edgar. “A Course on Energy Technology and Policy, Chemical Engineering Education, Vol. 41(3), pp.195-201, 2007.

[214]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “The Future of Open and Closed Loop Insulin Delivery for Diabetes Mellitus,” J. Pharm. Pharmacol., No. 60, pp. 1-13, 2008.

[215]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “Parameter Set Uniqueness and Confidence Limits in Model Identification of Insulin Transport Models from Simulation Data,” Diabetes Technology and Therapeutics, Vol. 10(2) pp 128-131, 2008.

[216]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “Physiologically-Based Modeling of Glucoregulatory System,” submitted, Ann. Biomed. Eng., 2007.

[217]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “Effects of Model Selection on Intravenous Infusion Algorithms for Glucose Control in Diabetic Patients,”  submitted, Ind. Eng. Chem. Res., 2007.

[218]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “In Vivo Simulations of pH-Responsive Cationic Hydrogels in Diabetic Patients,” submitted, Pharm. Res., 2007.

[219]      T.F. Edgar, “Performance Monitoring and Tuning Controllers”, Control Engineering,
p. 32, May, 2007.

[220]      C.A. Bode, J. Wang, Q.P. He, and T.F. Edgar.  “Run-to-Run Control and State Estimation in High-Mix Semiconductor Manufacturing”, Annual Reviews in Control, 31, pp. 241-253, 2007.

[221]      A. Prabhu and T.F. Edgar, “Performance Assessment of Run-to-Run EWMA Controllers”, IEEE Trans. Semiconductor Mfg., 20(4), 381-385, 2007.

[222]      J. Lee, W. Sung, C.H. Je, and T.F. Edgar, “Multiple Switching Relay for Identification of Frequency Responses” submitted to AIChE J., October, 2007.

[223]      W. Cho, J. Lee, and T.F. Edgar, “Nonlinear Model Identification for Temperature Control in a Single Wafer Rapid Thermal Processing”, submitted to Ind. Engr. Chem. Res., October, 2007.

[224]      Y. Zhang, and T.F. Edgar, “Generalized Model Based Design of Experiments (DOE) Criteria for DAE System Parameter Estimation”, accepted by Ind.  Engr. Chem. Res., 2007.

[225]      J. Lee, and T.F. Edgar, “A Simple Graphical Method for Pulse Test”, submitted to AIChE Journal, January, 2008.

[226]      J. Wang, P. He and T.F. Edgar, “State Estimation in High-Mix Semiconductor Manufacturing”, accepted by J. Process Control, April, 2008.

[227]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas, “In Vivo Simulations of the Intravenous Dynamics of Submicron Particles of pH-Responsive Cationic Hydrogels in Diabetic Patients”, submitted Ind. & Engr. Chem. Res., May, 2008.

[228]      A. Prabhu, and T.F. Edgar, “Identification and Monitoring of PID-Controlled Nonlinear Processes”, submitted Journal of Process Control, 2008.

[229]      A. Prabhu, and T.F. Edgar, “New State Estimation Methods for High-mix Semiconductor Manufacturing Processes”, submitted Journal of Process Control, 2008.

[230]      A. Prabhu, and R.P. Good, and T.F. Edgar, “Missing Data Estimation for Run-to-Run EWMA Controlled Processes”, submitted to Comp. & Chem. Engr., 2008.

[231]      T. G. Farmer Jr., T. F. Edgar, and N. A. Peppas. “Pharmacokinetic Modeling of the Glucoregulatory System,” submitted, J. Drug Delivery Sci. Tech., July, 2008.

[232]      T.G. Farmer Jr., T.F. Edgar and N.A. Peppas.  “Effectiveness of Intravenous Infusion Algorithms for Glucose Control in Diabetic Patients Using Different Simulation Models,”  submitted, Ind. Eng. Chem. Res., 2008.

[233]      W. Cho, J.T. Lee and T.F. Edgar. “Iterative Learning Dual-Model Control of Exothermic Batch Reactors”, Control Engineering Practice, Vol. 16, pp. 1244-1249, 2008.

[234]      J. Hedengren and T.F. Edgar.  “Approximate Nonlinear Model Predictive Control with In Situ Adaptive Tabulation”, Computers and Chemical Engineering, 32, pp. 706-714, 2008.

[235]      J. Davis and T.F. Edgar.  “Smart Process Manufacturing:  A Vision of the Future”, Ind. Eng. Chem. Research, Commemorative Essay (web), April, 2008.

[236]      Y. Zhang and T.F. Edgar.  “On-line Batch Process Monitoring using EWMA Combined with Hybrid-wise Unfolding Multiway PCA”, submitted to Ind. Eng. Chem. Res., July, 2008.

[237]      Y. Zhang and T.F. Edgar.  “A Robust Derivative Dynamic Time Warping Algorithm for Batch Process Synchronization”, submitted to Computers and Chemical Engineering,  July, 2008

[238]      D. Castiñeira and T.F. Edgar. “CFD for Simulation of Crosswind on the Efficiency of High Momentum Jet Turbulent Combustion Flames”, Journal of Environmental Engineering, Vol. 134, No. 7, pp. 561-571, 2008.

[239]      D. Castiñeira and T.F. Edgar. "CFD for Simulation of Wind-tunnel experiments on Flare Combustion Systems”, Energy and Fuels, Vol. 22, pp. 1698-1707, 2008.

[240]      W. Cho, J. Lee, and T.F. Edgar, “Iterative Identification of Temperature Dynamics in Single Wafer Rapid Thermal Processing”, accepted, Korean J. Chem. Engr., August, 2008.

[2] T.F. Edgar, D.M. Himmelblau and L.S. Lasdon, Optimization of Chemical Processes. McGraw-Hill, New York, New York, First Edition, 1988; Second Edition, 2001.

[3] D.E. Seborg, T.F. Edgar, and D.A. Mellichamp. Process Dynamics and Control. Wiley, New York, First Edition, 1989; Second Edition, 2004, Third Edition, 2009.

[14] C. Ling and T.F. Edgar. Process Control. In J. G. Williams, editor, Encyclopedia of Microcomputers. Marcel Dekker, New York, 1993.

[15] Y. Huang and T.F. Edgar. Knowledge-based Design Approach for the Simultaneous Minimization of Waste Generation and Energy Consumption in a Petroleum Refinery. Chapter 14 (pp. 181-196) in A. Rossiter, Waste Minimization Through Process Design, McGraw-Hill, New York, 1995.

[16] K.R. Muske and T.F. Edgar. Nonlinear State Estimation. In M. Henson and D. Seborg, co-editors, Nonlinear Process Control. Prentice Hall, New York, 1996.

[17] T.F. Edgar. Process Dynamics and Control, Section 18.3. The Electronics Handbook. CRC Press, 1996.

[18] J. Kantor and T.F. Edgar. Computing Skills in the Chemical Engineering Curriculum. Computers in Chemical Engineering Education, CACHE Corporation, Ann Arbor, MI 1997.

[19] T.F. Edgar et. al., “Process Control”, Section 8, Perry’s Handbook, 7 th Edition (D.W. Green and J.O. Maloney, Eds), McGraw-Hill, New York, 1997.

[20] J.Hahn and T.F. Edgar. Process Control Systems. Encyclopedia of Physical Science and Technology, Vol. 13, pp. 111-126, 2002.

[21] J. Hahn and T.F. Edgar, “Process Dynamics and Control”, Electronics Handbook, CRC Press, 2004.

[22] Y. Zhang and T.F. Edgar, Chapter 8, “Multivariate Statistical Process Control; in New Directions in Bioprocess Modeling and Control (G. McMillan and M. Boudreau), ISA, 2007.

[24] T.F. Edgar et al., Section 8: “Process Control”, Perry’s Chemical Engineering Handbook, 8th Edition (in press), 2008.

[23] T.F. Edgar and J. Hahn. Section 4.1 “Process Automation”, Handbook of Automation, Springer, New York, 2009.

[48]         C. Ling and T.F. Edgar. A New Fuzzy Gain Scheduling Algorithm for Process Control.  Proc. Amer. Cont. Conf., p. 2228, 1992.

[49]         J.R. Bosley and T.F. Edgar. Application of Nonlinear Model Predictive Control to Optimal Batch Distillation.  Proc. DYCORD'92 Conf., p. 271, 1992.

[50]         T.A. Badgwell, S.G. Bushman, A. Toprac, and T.F. Edgar. Modeling and Control of Microelectronics Materials Processing.  Proc. DYCORD'92 Conf., p. 243, 1992.

[51]         C. Ling and T.F. Edgar.  The Tuning of MIMO Fuzzy Heuristic Controllers.  Proc. IFAC Congress, Volume 6, p. 67, 1993.

[52]         T. Breedijk, I. Trachtenberg, and T.F. Edgar. A Model Predictive Controller In Multivariable Temperature Control in Rapid Thermal Processing.  Proc. Amer. Cont. Conf., p. 2980, 1993.

[53]         S. Chatterjee, I. Trachtenberg, and T.F. Edgar. Modeling and Control of RTCVD of Polysilicon.  Proc. RTP'93 Conf., p. 386, 1993.

[54]         G.D. Munkvold, K.G. Teague, J.J. Beaman, and T.F. Edgar. Prediction of Bed Pressure Profiles in OBOGS.  Proc. 30th Annual SAFE Conf., p. 58, 1993.

[55]         H. Ouarti and T.F. Edgar. The Use of Approximate Models and Exact Linearization for Control of Nonlinear Processes.  Proc. Amer. Cont. Conf., p. 2268, 1993.

[56]         T.F. Edgar and Y.L. Huang.  Simultaneous Recovery of Waste Chemicals and Energy in an Oil Refinery.  I&EC Special Symposium, ACS, Atlanta, Georgia, September 1993.

[57]         S. Bushman, T.F. Edgar, and I. Trachtenberg.  Process Control and Diagnostics for Plasma Etch Systems.  Proc. Electrochem. Soc., 1994.

[58]         K.F. McBrayer and T.F. Edgar. Bias Detection and Estimation in Dynamic Data Reconciliation.  Proc. ADCHEM'94 Conf., p. 531, 1994.

[59]         T. Breedijk and T.F. Edgar. Parameter Estimation and Nonlinear Predictive Control for RTP.  Proc. ADCHEM'94 Conf., p. 85, 1994.

[60]         J.R. Bosley and T.F. Edgar. Appropriate Modeling Assumptions for Batch Distillation Optimization and Control.  Proc. PSE'94 Conf., p. 477, 1994.

[61]         W. Cho, K.S. Balakrishnan, T. F. Edgar, and I. Trachtenberg. Control of Remote Plasma-Enhanced Chemical Vapor Deposition of Silicon Nitride.  Proc. PSE'94 Conf., p. 1235, 1994.

[62]         T. Breedijk and T.F. Edgar. Model-Based Control of Rapid Thermal Processes.  Proc. Amer. Cont. Conf., p. 887, 1994.

[63]         C. Ling and T.F. Edgar. The Experimental Verification of the Model-Based Fuzzy Gain Scheduling Technique.  Proc. Amer. Cont. Conf., p. 2475, 1994.

[64]         T. Breedijk and T.F. Edgar. Overview of Process Control Issues in Rapid Thermal Processing.  Proc. RTP'94 Conf., p. 267, Monterrey, CA, 1994.

[65]         K.S. Balakrishnan, W. Cho, and T.F. Edgar. Comparison of Controller Tuning Methods for Temperature Uniformity Control in a Rapid Thermal Processor.  Proc. SPIE'94 Conf., volume 2336, p. 71, October 1994.

[66]         S. Bushman and T.F. Edgar. Radio Frequency Diagnostics for Plasma Etch Systems.  Proc. SPIE'94 Conf., volume 2336, p. 5, October 1994.

[67]         J. Stuber, I. Trachtenberg, and T.F. Edgar. Model-Based Control of Rapid Thermal Processes.  Proc. IEEE CDC’94 Conf., volume 1, pp. 79-85, December,1994.

[68]         D. Sourlas, T.F. Edgar, and V. Manousiouthakis.  Best Achievable Low Order Dentralized Performance.  Proc. Amer. Cont. Conf., p. 3364, 1994.

[69]         T.F. Edgar and J. Kantor.  Computing  Skills  in  the  Chemical Engineering  Curriculum.  Proc. Chemputers Conf., p. 87, February, 1995.

[70]         J.D. Stuber, T. Breedijk, and T.F. Edgar.  Model-Based Control of Rapid Thermal Processes.  Proc. Electrochem. Soc., p. 113, 1995.

[71]         S. Bushman, T.W. Karjala, D.M. Himmelblau, I. Trachtenberg, and T.F. Edgar.  Modeling of Plasma Etch Dynamics Using Linear and Nonlinear Models.  Proc. Electrochem. Soc., p. 218, 1995.

[72]         K. Edwards and T.F. Edgar.   General Methods of Kinetic Model Reduction.  Proc. DYCORD,
p. 63, 1995

[73]         R. Dunia, Joe Qin, and T.F. Edgar.  Multivariable Process Monitoring Using Nonlinear PLS Approach.  Proc. Amer. Cont. Conf., Seattle, WA p. 756-760, 1995.

[74]         R. Dunia, T.F. Edgar, and Benito Fernandez.  Application of the Sliding Surface to Generic Model Control.  Proc. Amer. Cont. Conf., p. 2210, 1995.

[75]         R. Dunia, S.J. Qin, T.F. Edgar and T.J. McAvoy.  Sensor Fault Identification and Reconstruction Using Principal Component Analysis.  IFAC Congress '96.  San Francisco, CA. pp. 259-264, July 1996.

[76]         K.S. Balakrishnan, T.L. Cooper, and T.F. Edgar.  Model-based Control of a Rapid Thermal Processor.  RTP '96 Symposium, Boise, ID, September 1996.

[77]         J. Stuber, I. Trachtenberg and T.F. Edgar.  Optical Temperature Management in RTP by Frequency Analysis of Periodic Light Signals.  RTP '96 Symposium, Boise, ID, September 1996.

[78]         Y. Cheng, S.J. Qin and T.F. Edgar.  Monitoring of Batch Processes in Semiconductor Manufacturing Using PCA.  ADCHEM '97, June, 1997.

[79]         R. Dunia, S.J. Qin, and T.F. Edgar.  A Unified Approach to Process and Sensor Fault Identification Using PCA.  US/China Joint Chemical Engineering Conference, Beijing, May 19-22, 1997.

[80]         Y. Cheng, Q. Wang, T. Riley, M. Miller, and T.F. Edgar.  Monitoring of a RTP Process Using Multi-PCA.  Sixth Internatonal Symposium on Semiconductor Manufacturing, San Francisco, October 6-8, 1997.

[81]         Y. Cheng, J. Qin, and T.F. Edgar.  Modeling of OES Data to Estimate Etch Rate for Etching Equipment.  SPIE 1997 Symposium on Microelectronic Manufacturing, Austin, Vol. 3213, pp. 108-118, October 1997.

[82]         B. Ko and T.F. Edgar.  Assessment of Achievable PI Control Performance for Linear Processes with Dead Time.  Proc. Amer. Cont. Conf., pp. 1548-1552, June, 1998.

[83]         T.F. Edgar.  Process Modeling and Control:  A Vision of the Future.  US/China Joint Chemical Engineering Conference, Beijing, May 19-22, 1997.

[84]         T.F. Edgar.  Process Modeling and Control:  A Vision of the Future. Advances in Control 5, Swansea, Wales, September, 1998.

[85]         C. Pfeiffer and T.F. Edgar.  Robust Feedback Linearization and Fuzzy Control.  Proceedings of Amer. Cont. Conf. San Diego, CA, pp. 1508-1514, 1999.

[86]         B.S. Ko, and T.F. Edgar.  Multiloop PID Control Performance Monitoring.  Submitted to The 8th Congress of Aston Pacific Confederation of Chemical Engineering (APCCHE), Seoul, Korea, August, 1999.

[87]         W.J. Campbell, C. Bode, and T.F. Edgar.  Model-based Control In Microelectronics Manufacturing.  The 38th IEEE Conference on Decision and Control, Phoenix, AZ, p. 4185-4192, 1999

[88]         D.A. Dixon, G.V. Reklaitis and T.F. Edgar.  Vision 2020:  Computational Needs of the Chemical Industry, Impact of Advances in Computing and Communications Technologies on Chemical Science and Technology, National Academy Press, 1999.

[89]         T.F. Edgar.  Process Engineering in the 21st Century:  The Impact of Information Technology.  Phillips Petroleum Lecture:  Oklahoma State University, 1999.

[90]         T.F. Edgar.  Information Technology and Chemical Engineering Education:  Evolution or Revolution?  Second Chemical Engineering Academy Lecture:  University of Missouri-Rolla, April, 1999.

[91]         B.S. Ko, and T.F. Edgar.  Performance Assessment of Multivariable Feedback Control Systems Using Plant Markov Parameters.  Proc. Amer. Control Conf., p. 4373-4377, 2000.

[92]         T.A. Soderstrom and T.F. Edgar.  A Mixed Integer Optimization Approach for Simultaneous Data Reconciliation and Identification of Measurement Bias.  ADCHEM 2000, Pisa, Italy, 2000.

[93]         T.F. Edgar.  Information Technology and Chemical Engineering Education:  Evolution or Revolution? ASEE 2000, St. Louis, 2000.

[94]         T.F. Edgar.  Chemical Engineering Education and the Three C’s:  Computing, Communication, and Collaboration.  Presented at Annual AIChE Meeting, Los Angeles, November, 2000.

[95]         C.A. Bode, A.J. Toprac, R.D. Edwards, and T.F. Edgar.  Lithography Overlay Controller Formulation.  SPIE Meeting, Fall 2000.

[96]         A.J. Pasadyn, A.J. Toprac, and T.F. Edgar.  Adaptive Control of Multiple Product Processes, SPIE Meeting, Fall 2000.

[97]         J. Hahn and T.F. Edgar.  Reduction of Nonlinear Models Using Balancing of Empirical Gramians and Galerkin Projections.  Proc. Amer. Control Conf., p.2864-2868, 2000.

[98]         J. Pasadyn, A.J. Toprac, and T.F. Edgar.  Online Parameter Estimation for Simultaneous Control of Multiple Products and Processes AEC/APC Symposium XII, pp. 319-328, Lake Tahoe, CA, September, 2000.

[99]         J. Wood, T.F. Edgar et al.  Deploying Computer-aided Cross-Training of Technicians and Engineers for Semiconductor Manufacturing.  Proc. of Amer. Soc. of Engr. Educ. Meeting, Albuquerque, NM, 2001.

[100]      V. Martinez, K.F. McBrayer and T.F. Edgar.  Referential Lot to Lot Control of Photolithography Overlay Process, Proc.  AEC/APC, Banff, Alberta, CA, October, 2001.            

[101]      M. Miller, W.J. Campbell, S. Firth and T.F. Edgar.  Defining a Benchmark Suite for Comparison of Run-to-Run Controllers, Proc. AEC/APC, Banff, Alberta, CA, October, 2001.

[102]      J. Hahn and T.F. Edgar.  Nonlinearity Quantification and Model Classification using Gramians and other Variance Matrices. Proc. AIChE 2001 Annual Meeting, Reno, NV, November 2001.

[103]      B.S. Ko and T.F. Edgar.  Performance Assessment of Multivariable Feedback Control Systems.  Automatica, 37, pp. 899-905, 2001.

[104]      S. Alici and T.F. Edgar.  Use of Model Reduction and Identification Tools for Dynamic Data Reconciliation, Proc. of 15th IFAC World Congress, pp. 1491-1495, Barcelona, Spain, 2002.

[105]      S.K. Firth, W.J. Campbell and T.F. Edgar. Just in time Adaptive Disturbance Estimation for Run-to-Run Control of Photolithography Overlay, SPIE Meeting, Santa Clara, CA, 2002.

[106]      J.T. Lee and T.F. Edgar. Interaction Measure for Decentralized Multivariable Control of Multivariable Processes, Proc. Amer. Cont. Conf., pp, 454-459, 2002.

[107]      J. Wood,  T.F. Edgar, et al., “Closing the Loop on Cross-Training Technicians and Engineers for Semiconductor Manufacturing,” 2002 ATESM Convention, MATEC, Tempe, AZ, 2002.

[108]      C. Bode, T.F. Edgar and B.S. Ko.  Run-to-Run Control and Performance Monitoring of Overlay in Semiconductor Manufacturing.  15th IFAC World Congress, pp. 1480-1484, Barcelona, Spain, 2002.

[109]      J. Hahn, U. Krueger, T.F. Edgar and W. Marquardt.  “Application of Model Reduction for Model Predictive Control”, 15th IFAC World Congress, pp. 684-688, Barcelona, Spain, 2002.

[110]      J. Campbell, S. Firth, A. Toprac and T.F. Edgar.  “A Comparison of Run-to-Run Control Algorithms”, Proc. Amer. Contr.Conf., pp. 2150-2155, 2002.

[111]      T.F. Edgar. “Integrating Instructional Technology in the Classroom,” ASEE Chemical Engineering Summer School, Boulder, CO, July, 2002 (on CD).

[112]      T.F. Edgar. “Teaching Process Control”, ASEE Chemical Engineering Summer School, Boulder, CO, July, 2002 (on CD).

[113]      T.F. Edgar.  “A Batch Process Control Framework for Semiconductor Manufacturing”, Aspenworld, Washington DC, October 2002.

[114]      V. Martinez, K.F. McBrayer and T.F. Edgar. “Adaptive Estimation and Control of Overlay Tool Bias, AEC/APC XII Symposium, Snowbird, UT, September, 2002.

[115]      T.A. Soderstrom, D.M. Himmelblau and T.F. Edgar. A Mixed Integer Nonlinear Optimization Based Approach to Simultaneous Data Reconciliation and Bias Identification, FOCAPO 2003, Boca Raton, FL., January, 2003.

[116]      S. Harrison, M. Braun, and T.F. Edgar.  An Evaluation of the Effects of Product Mix and Metrology Delay on the Performance of Segregated Versus Threaded EWMA Control, AEC/APC Conference, 2003.        

[117]      V. Martinez,  K.F. McBrayer and T.F. Edgar.  On-line Adaptive Estimation and Control of Overlay Tool Bias, SPIE Advanced Microelectronic Manufacturing, Santa Clara, CA, February, 2003.

[118]      Y. Chen, V. Manousiouthakis and T.F. Edgar, “On Infinite Time Nonlinear Quadratic Optical Control”, Proc. Conf. Decision and Control, 2003.

[119]      J.T. Lee and T.F. Edgar, “Upper Bounds of Structured Singular Values for Mixed Uncertainties”, Proc. Conf. Decision and Control, 2003.

[120]      R. Chong, K. Lensing, B. Swain and T.F. Edgar, “Optimizing STI Etch Process Control Using Optical Digital Profilometry”, Micromagazine.com, June, 2004.

[121]      J.D. Hedengren and T.F. Edgar, “In Situ Adaptive Tabulation for Real-time Control”, Proc. Amer. Cont. Conf., pp. 2222-2227, Boston, MA, 2004.

[122]      J.B. Rawlings and T.F. Edgar, “Frontiers of Chemical Engineering:  The Systems Approach”, DYCOPS Conf., paper no. 206, Boston, MA, 2004.

[123]      J.D. Hedengren and T.F. Edgar, “Order Reduction of Large Scale DAE Models”, Texas A&M Symposium on Complex Processes, 2004.

[124]      T.F. Edgar, “Computing Through the Curriculum:  An Integrated Approach for Engineering”, ASEE Annual Meeting, Salt Lake City, UT, June, 2004.

[125]      T.F. Edgar, “When Does Controllability Equal Profitability”, Process Systems Engineering Symposium, Kunming, China, January, 2004.

[126]      G. Farmer, T.F. Edgar and N.A. Peppas, “Modeling and Control of the Behavior of Glucose Sensing Devices”, in N.A. Peppas, K. Anseth, A.K. Dillow and C.E. Schmidt, eds., Advances in Biomaterials, Bionanotechnology, Biomimetic Systems and Tissue Engineering, 231-234, AIChE, New York, NY, 2004.

[127]      S.A. Harrison, T.F. Edgar, and G.S. Hwang, “Annihilation of Arsenic-Vacancy Complexes in Crystalline Silicon”, 205th Electrochemical Society Conference, San Antonio, TX, May, 2004.
[128]      S.A. Harrison, T.F. Edgar, and G.S. Hwang, “Diffusion of Fluorine-Silicon Interstitial Complex in Crystalline Silicon,” Materials Research Society Spring Meeting, San Francisco, CA, April 2005.
[129]      S.A. Harrison, T.F. Edgar, and G.S. Hwang, “Role of Interstitials in As TED and Clustering in Crystalline Silicon,” Materials Research Society Spring Meeting, San Francisco, CA, April, 2005. 
[130]      S.A. Harrison, T.A. Kirichenko, D. Yu, T.F. Edgar, S.K. Banerjee, and G.S. Hwang, “Origin of Vacancy and Interstitial Stabilization at the Amorphous-Crystalline Silicon Interface,” Materials Research Society Spring Meeting, San Francisco, CA, April, 2005.

[131]      T.F. Edgar, “Order Reduction of Large Scale DAE Models”, IFAC 16th World Congress, Prague, Czechoslovakia, July, 2005.

[132]      T.F. Edgar, B. Ogunnaike, J. Downs, B.W. Bequette and K.R. Muske, “Renovation of the Undergraduate Process Control Course”, Proceedings of Chemical Process Control VII (CPC7), Lake Louise, Alberta, January, 2006.

[133]      B. Ogunnaike, T.F. Edgar and K.R. Muske, “Graduate Process Control Education:  A Global View”, Proceedings of Chemical Process Control VII (CPC7), Lake Louise, Alberta, January, 2006.

[134]      J. Hedengren, T.F. Edgar and J.B. Rawlings, “Moving Horizon Estimation – The Explicit Solution”, Proceedings of Chemical Process Control VII (CPC7), Lake Louise, Alberta, January, 2006.

[135]      L. Rueda and T.F. Edgar, “Experimental Validation of Model-Based Control Strategies for Multicomponent Azeotropic Distillation”, Proceedings of ADCHEM Symposium, Gramado, Brazil, April, 2006.

[136]      A. Prabhu, R. Chong, and T.F. Edgar, “Performance Assessment of Run-to-Run EWMA Controllers”, Proceedings of ADCHEM International Symposium on Advanced Control of Chemical Processes, Gramado, Brazil, pp. 1127-1132, April 2-5, 2006.

[137]      S.A. Harrison, T.F. Edgar, and G.S. Hwang, “Mechanisms for Interstitial-Mediated Transient Enhanced Diffusion of N-type Dopants in Crystalline Silicon”, Materials Research Society Spring Meeting, San Francisco, CA, April, 2006.

[138]      T.F. Edgar.  “Chemical Process Control:  Benchmarks, Technology Drivers, and Future Directions”, The ConFab Meeting, Las Vegas, NV, May, 2006.

[139]      A.V. Prabhu and T.F. Edgar.  “A Novel Method for Performance Assessment of Run-to-Run EWMA Controllers”, AEC/APC Symposium XVIII, Westminster, CO, October, 2006.  Best Student Paper Award.

[140]      Y. Zhang and T.F. Edgar.  “Bio-reactor Monitoring with Multiway-PCA and Model based-PCA”, AIChE Meeting, San Francisco, CA, 2006.

[141]      Y. Zhang and T.F. Edgar.  “On-line Batch Process Monitoring Using Modified Dynamic Batch PCA”, Proceedings of the 2007 ACC Conference, pp. 2551-2556, New York City, NY, 2007.

[142]      T.G. Farmer, N.A. Peppas, and T.F. Edgar.  “Design of A Polymeric Insulin Infusion System for Blood Glucose Control”, Proceedings of the 2007 ACC Conference, pp.607-612-New York City, NY, 2007.

[143]      H. Lee, M. Funk and T.F. Edgar.  “Advantages of Wafer-to-Wafer Feedback Control for High Volume Polysilicon Gate Etch Process Using Integrated Scatterometry”, AEC/APC XIX Symposium, Indian Wells, CA, 2007.

[144]      J. Wang, Q.P. He, and T.F. Edgar.  “A General Framework for State Estimation in High-Mix Semiconductor Manufacturing”, Proceedings of the 2007 ACC Conference, pp.3636-3641, New York City, NY, 2007.

[145]      X. Liang, D.B.Weber, T.F. Edgar, L.W. Lake, M. Sayarpour, and A.A. Yousef.  “Optimization of Oil Production in a Reservoir Based on Capacitance Model of Production and Injection Rates”, SPE 107713, SPE Hydrocarbon Economics and Evaluation Symposium, Dallas, TX, 2007.

[146]      W. Cho, J.T. Lee, and T.F. Edgar.  “Nonlinear Model Identification for Temperature Control in a Single Wafer Rapid Thermal Processing”, AIChE Annual Meeting, Salt Lake City, UT, November, 2007.

[147]      Zhang, Y, and T.F. Edgar.  “Generalized Model Based Design of Experiments (DOE)
Criteria for DAE System Parameter Estimation”, AIChE Annual Meeting, Salt Lake City, UT, November, 2007.

[148]      J. Lee, C.H. Je, S.W. Sung, and T.F. Edgar.  “Multiple Switching Relay for Identification of Frequency Responses”, 17th IFAC World Congress, 2008.

[149]      A.V. Prabhu, T.F. Edgar, and R.P. Good.  “Missing Data Estimation for Run-to-Run EWMA Controlled Processes, Proceedings of the Foundations of Computer-Aided Process Operations (FOCAPO) Conference, pp. 327-330, Cambridge, Massachusetts, June 2008.

[150]      Y. Zhang, and T.F. Edgar.  “A Robust Dynamic Time Warping Algorithm for Batch Trajectory Synchronization”, Proceedings of the 2008 ACC Conference, pp. 2864-2869, Seattle, Washington, 2008.

[151]      R. Dunia, T.F. Edgar, and F. Haugen.  “A Complete Programming Framework for Process Control Education”, 2008 IEEE Multi-Conference on Systems and Control, 2008.

[152]      H. Lee, et al., “Advanced Profile Control and the Impact of Sidewall Angle at Gate Etch for Critical Nodes”, SPIE, San Jose, February, 2008.

[152]      B.R. Parkinson, H.J. Lee, T.F. Edgar, D. Prager, and M. Funk.  “Application of Multivariable Control Systems in Wafer-to-Wafer Control, AEC/APC Symposium, Salt Lake City, October 2008.

[153]      K.H. Baek and T.F. Edgar.  “Optimum Sensor Selection and Utilization Technique for Plasma Etching”, AEC/APC Symposium, Salt Lake City, October 2008.

[154]      M. Fowler and T.F. Edgar.  “Control Precise Blending of Semiconductor Processing Solutions”, AEC/APC Symposium, Salt Lake City, October 2008.

[155]      J. Stuber, H. Lee and T.F. Edgar.  “Dynamic Sampling in Automated Process Control”, AEC/APC Symposium, Salt Lake City, October 2008.     

[156]      S.Z. Fashami, S. Cohen, G. T. Rochelle, T.F. Edgar, M. Webber.  “Flexible Operation of Amine Scrubbing in Response to Electric Demand and Pricing”, GHG Symposium, 2008.

[157]      Y. Zhang and T.F. Edgar.  “A Robust Derivative Dynamic Time Warping Algorithm for Batch Process Control”, Proceedings of the 2008 ACC Conference, pp. 2864-2869, Seattle, WA 2008.

[158]      T.F. Edgar.  “Process Monitoring and Control of Plasma Etching”, Vol. STS-2, pp. 65-77, Semicon Korea, Seoul, Korea, January 2008.

[159]      T.F. Edgar.  “Process Control:  Batch to the Future”, Adconip Conference, pp. 10-19, Jasper, Alberta, May, 2008.

[160]      A.V. Prabhu, R.P. Good and T.F. Edgar.  “Missing Data Estimation for Run-to-Run EWMA-Controlled Processes”, Proceedings of Foundations of Computer-Aided Process Operations, (FOCAPO 2008), Boston, MA, June, 2008.

[27] A.Toprac, 8/92, Modeling and Experimentation in the Chemical Vapor Deposition of Silicon in a Single Wafer Rapid Thermal System

[28] G. T.Wright, 5/92, Modeling and Nonlinear Predictive Control of a Fixed-Bed Water-Gas Shift Reactor

[29] T. Badgwell, 12/92, Modeling and Optimization of Multiwafer Low Pressure Chemical Vapor Deposition Reactors

[30] S. Chatterjee, 12/93, Modeling and Parameter Estimation in a Single Wafer Rapid Thermal Reactor

[31] C. Ling, 12/93, A Study of New Model-based Fuzzy Control Techniques and their Verifications

[32] J. Bosley, 5/94, An Experimental Investigation of Modeling, Control, and Optimization

[33] T. Breedijk, 12/94, Model Identification and Nonlinear Predictive Control of Rapid Thermal Processing Systems.

[34] S. Bushman, 12/95, Process Monitoring, Modeling, and Control of Plasma Etch Systems.

[35] K. McBrayer, 2/96, Detection and Identification of Bias in Nonlinear Dynamic Processes.

[36] J. Stuber, 9/96, Modeling Control and Temperature Measurement in Rapid Thermal Processing.

[37] R. Dunia, 5/97. A Unified Geometric Approach for Process Monitoring and Control.

[38] K. Edwards, 12/97. Kinetic Model Reduction Utilizing Optimization and Variable Selection Techniques.

[39] S. Morrison, 5/98. Scheduling Methods for Batch Digestors, Batch Process Plants, and Job Shops with the Conveyor Algorithm.

[40] K. Balakrishnan, 5/98. Temperature and Process Uniformity Control in Rapid Thermal Processing.

[41] K. Teague, 5/99. Productive Dynamic Model of a Small Nonisothermal Pressure Swing Air Separation Process.

[42] J. Campbell, 8/99. Run-to-Run Control of Chemical Mechanical Planarization.

[43] C. Pfeiffer, 12/99. Analysis and Design of Heterogeneous Control Laws for Nonlinear Chemical Processes.

[44] B.S. Ko, 5/00. On Performance Assessment of Feedback Control Loops.

[45] T. Soderstrom, 5/01. Integration of On-Line Data Reconciliation and Bias Identification Techniques.

[45] C. Bode, 5/01. Run-to-Run Control of Overlay and Linewidth in Semiconductor Manufacturing.

[46] S. Alici, 8/01. Dynamic Data Reconciliation using Process Simulation Software and Model Identification Tools.

[47] A. Pasadyn, 10/01. Simultaneous Run-to-Run Control and Identification for Multiple Products and Process Environments.

[48] J. Hahn, 5/02. A Balancing Approach to Analysis and Reduction of Nonlinear Systems.

[49] S.B. Hwang, 5/02. Modeling of RTCVD of SiGe.

[50] J. Schell, 5/02. Modeling and Control of Reactive Distillation Column.

[51] S.K. Firth, 12/02. Just-in-Time Adaptive Disturbance Estimation for Run-to-Run Control in Semiconductor Processes.

[52] V.M. Martinez, 12/02. Adaptive Run-to-Run Control of Overlay in Semiconductor Manufacturing.

[53] J. Peng, 5/03. Modeling and Control of Packed Reactive Distillation Columns.

[54] S. Lextrait, 5/04. Packed Reactive Distillation Columns, Modeling, Simulation, and Control Analyses.

[55] J. Hedengren, 5/05. Real-time Estimation and Control of Large-scale Nonlinear DAE Systems.

[56] W. Cho, 5/05. Modeling and Control of Rapid Thermal Chemical Vapor Deposition Reactor.

[57] L. Rueda, 12/05. Modeling and Control of Multicomponent Distillation Systems Separating Highly Non-Ideal Mixtures.

[58] D. Castiniera, 5/06. Modeling of Flare Combustion Systems Using Computational Fluid Dynamics.

[59] S. Harrison, 5/06. First-principles Modeling of Arsenic and Fluorine Behavior Ultrashallow Junction Formation.

[60] K. Chamness 12/06. Integrated Methods for Semiconductor Process Monitoring and Fault Detection.

[61] T. Farmer 5/07. Intravenous Closed-Loop Glucose Control in Type I Diabetic Patients.

[62] A. Prabhu, 8/08. Performance Monitoring of Run-to-Run Control Systems used in Semiconductor Manufacturing.

[63] Y. Zhang, 8/08. Improved Methods in Statistical and First Principles Modeling for Batch Process Control and Monitoring.

[64] H. Lee, 8/08. Advanced Process Control and Optimal Sampling in Semiconductor Manufacturing.

In Progress

D. Thiele, D. Weber, I. Castillo, S. Abrol, S. Ziaii, D. French, B. Gill, B. Parkinson